One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in Si is 2.5 x 1020 atoms/m. The predeposition heat treatment is to be conducted at 1000°C for 45 minutes, with a constant surface concentration of 8x 10^26 As atoms/m³. At a drive in temperature of 1100°C, determine the diffusion time required for a junction depth of 1.21m. For this system, values of Q and Do are 4.10 eV and 2.29x10^3m/s, respectively.

One Integrated Circuit Design Calls For The Diffusion Of Arsenic Into Silicon Wafers; The Background

Answers

Answer 1

The diffusion time that is needed for the junction depth of 1.21 m is given as 13875 seconds

How to solve for the diffusion time

background concentration of As in Si is 2.5 x 10²⁰ atoms/m

tp = 1000°c

tp = 45 minutes

= 45 x 60 seconds

surface concentration = 8x 10^26

Td = 1100°c

Junction depth = 1.2

= 1.2 x 10⁻⁶m

qd = 4.10ev

Do = 2.29 x 10⁻³

We have to use the equation

[tex]Dp = Doexp(-\frac{qd}{kTP} )\\\\= (2.23 * 10^-^1^3 m^2/s) exp [-\frac{4.10}{8.62*10^-^5 *(1000+273)} ][/tex]

= 1.36 x 10⁻¹³

From the relation that we have here

[tex]Qo = 2cs\sqrt{\frac{Dpte}{pi} } \\\\= 2 * 8* 10^2^6*\sqrt{\frac{1.36*10^-^1^3(45*60)}{pi} }[/tex]

Qo = 1.73 x 10¹³

Dd at 1100

[tex]Dd = 2.29*10^-^3exp(\frac{-4.10}{8.62x10^-^5)(1100 + 273)}[/tex]

Dd = 2.06 x 10⁻¹⁸m²/s

From the relation we have

[tex]exp[\frac{(1.2 * 10^-^6)^2}{4*(2.06x10^-^1^8)+d} ]=\frac{1.73*10^1^9}{2.5x10^2^0*\sqrt{pi*2.06*10^-^1^8x+d} }[/tex]

[tex]ln\frac{2.72*10^7}{\sqrt{+d} } =\frac{1.75*10^5}{+d}[/tex]

Using heat and trial, we would have the value of +d = 13875 seconds

The diffusion time is 13875 seconds

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DRIVERS ED PLEASE HELP
The interactive activities in this course .
will
be tested in the final exam but not the lesson quizzes
will be scored by your instructor
will be tested in lesson quizzes but not the final exam
will not be scored
Submit answer

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Explanation:

bro don't ask people for this you will get a bad grade if the host finds that you cheated

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Answers

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Explanation:

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